公开(公告)号：US20250153122A1

公开(公告)日：2025-05-15

申请号：US18741245

申请日：2024-06-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SUNGHYUN PARK ,  Minsuk KANG ,  Young-Hoo KIM ,  Jinseon YOU ,  Tae-Hong KIM ,  Woogwan SHIM

IPC: B01F35/221 ,  B01F35/21 ,  B01F35/90 ,  B01F35/92 ,  B01F101/58 ,  H01L21/67

Abstract: A chemical liquid exchange method includes: recovering, by a first recycling tank, a first portion of a first chemical liquid that was previously used in a chamber; recovering, by a second recycling tank, a second portion of the first chemical liquid that was previously used in the chamber; supplying, from the first recycling tank, the first portion of the first chemical liquid to a first sub-tank; draining, from the second recycling tank, the second portion of the first chemical liquid; supplying, from the first sub-tank, the first portion of the first chemical liquid to a main tank; and receiving, by a second sub-tank, a second chemical liquid from an outside; and supplying, from the second sub-tank, the second chemical liquid to the main tank.