Signal transfer structure for test equipment and automatic test apparatus for testing semiconductor devices using the same

    公开(公告)号:US11035882B2

    公开(公告)日:2021-06-15

    申请号:US16430618

    申请日:2019-06-04

    Abstract: A signal transfer structure including a tapered input line extending in a first direction and having an input terminal and a contact terminal, a width of the input line increasing from the input terminal to the contact terminal in the first direction and a signal being input to the input terminal; a diverging line in contact with the contact terminal of the input line and extending in a second direction different from the first direction; an output line connected to the diverging line and from which the signal is output; and an interconnector, the interconnector including a vertical via between the diverging line and the output line and a via line connected to the vertical via and having a same characteristic impedance as the output line.

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