METHOD OF VERIFYING OPTICAL PROXIMITY EFFECT CORRECTION

    公开(公告)号:US20210241446A1

    公开(公告)日:2021-08-05

    申请号:US16947909

    申请日:2020-08-24

    Inventor: KISUNG KIM

    Abstract: A method of verifying optical proximity effect correction includes generating a design pattern layout including a target pattern, generating a correction pattern layout from the design pattern layout by performing optical proximity effect correction, generating a contour image including an image pattern using the correction pattern layout, detecting a defect pattern from the image pattern of the contour image, and correcting the correction pattern layout using data of the defect pattern. Detecting the defect pattern includes acquiring position data of a center of gravity of the target pattern, acquiring position data of a center of gravity of the image pattern, and determining whether the image pattern is a defect pattern by comparing a defect pattern detection reference with a distance between the center of gravity of the target pattern and the center of gravity of the image pattern.

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