-
公开(公告)号：US20210057193A1
公开(公告)日：2021-02-25
申请号：US17091433
申请日：2020-11-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： SANG KI NAM , SUNGGIL KANG , SUNGYONG LIM , BEOMJIN YOO , AKIRA KOSHIISHI , VASILY PASHKOVSKIY , KWANGYOUB HEO
Abstract: A hollow cathode includes an insulation plate having cathode holes. Bottom electrodes are below the insulation plate. The bottom electrodes define first holes having a width greater than a width of the cathode holes. Top electrodes are at an opposite side of the insulation plate from the bottom electrodes. The top electrodes define second holes aligned with the first holes along a direction orthogonal to the upper surface of the insulation plate.
Search Results
1
records
(took 0.011 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
