公开(公告)号：US20200066499A1

公开(公告)日：2020-02-27

申请号：US16395532

申请日：2019-04-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyeong-Hun KIM ,  Jeong-Il MUN ,  Hyung-Joo LEE ,  Jong-Woo SUN ,  Dong-Kyu KIM

IPC: H01J37/32 ,  G01N21/68 ,  G01J3/443 ,  G01J3/02

Abstract: Provided is a plasma monitoring apparatus including an objective lens configured to collect light that is emitted from plasma and passes through an optical window of a chamber, a beam splitter configured to divide the light collected by the objective lens into first light and second light, a first optical system and a second optical system that are provided on a first optical path of the first light and a second optical path of the second light, respectively, the first optical system and the second optical system having different focal lengths such that focal points of the first optical system and the second optical system are set at different regions in the plasma, and a light detector configured to detect the first light that has passed through the first optical system and the second light that has passed through the second optical system.