公开(公告)号：US20220115422A1

公开(公告)日：2022-04-14

申请号：US17368039

申请日：2021-07-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： MINKWAN KIM ,  IN SUNG JOE ,  Jinhyung KIM ,  Dhami PARK ,  INYONG PARK ,  Kisang YOON

IPC: H01L27/146

Abstract: Disclosed is an image sensor including a substrate that includes a plurality of pixel sections and having a first surface and a second surface opposite to each other, an antireflective layer disposed on the second surface of the substrate, a passivation layer disposed on the antireflective layer, a plurality of color filters disposed on the passivation layer and corresponding pixel sections, a plurality of micro-lenses disposed on the color filters, and a gap region that separates the micro-lenses from each other. The gap region extends between the color filters and separates the color filters from each other. The gap region exposes a portion of a top surface of the passivation layer. A thickness of the passivation layer is less than a thickness of the antireflective layer.

公开(公告)号：US20230170376A1

公开(公告)日：2023-06-01

申请号：US18046491

申请日：2022-10-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KIJOONG YOON ,  KEEWON KIM ,  MINKWAN KIM ,  SANGHOON AHN ,  HAJIN LIM ,  JONGMIN JEON ,  TAEKSOO JEON ,  JAESUNG HUR

IPC: H01L27/146

CPC classification number: H01L27/14685 ,  H01L27/14645 ,  H01L27/1462 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/1463

Abstract: A method of fabricating an image sensor includes providing a substrate that includes a plurality of pixel regions, forming an anti-reflection layer on the substrate, forming color filters on the anti-reflection layer, where the color filters are spaced apart from each other by openings, forming pyrolytic polymer patterns between the color filters that fill the openings, forming a capping layer on the color filters and the pyrolytic polymer patterns, and performing a thermal treatment process that removes the pyrolytic polymer patterns and forms air gap regions between the color filters.