公开(公告)号：US20200299829A1

公开(公告)日：2020-09-24

申请号：US16714344

申请日：2019-12-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KEEWON KIM ,  DAEHAN KIM ,  MINKYUNG LEE

IPC: C23C14/54 ,  H01L51/05 ,  C23C14/24 ,  C23C14/56

Abstract: Disclosed are an apparatus for and a method of manufacturing a semiconductor device, The apparatus includes a chamber, an evaporator that evaporates an organic source to provide a source gas on a substrate in the chamber, a vacuum pump that pumps the source gas and air from the chamber, an exhaust line between the vacuum, pump and the chamber, and an analyzer connected to the exhaust line. The analyzer detects a derived molecule produced from the organic source and determines a replacement time of the evaporator.

公开(公告)号：US20230170376A1

公开(公告)日：2023-06-01

申请号：US18046491

申请日：2022-10-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KIJOONG YOON ,  KEEWON KIM ,  MINKWAN KIM ,  SANGHOON AHN ,  HAJIN LIM ,  JONGMIN JEON ,  TAEKSOO JEON ,  JAESUNG HUR

IPC: H01L27/146

CPC classification number: H01L27/14685 ,  H01L27/14645 ,  H01L27/1462 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/1463

Abstract: A method of fabricating an image sensor includes providing a substrate that includes a plurality of pixel regions, forming an anti-reflection layer on the substrate, forming color filters on the anti-reflection layer, where the color filters are spaced apart from each other by openings, forming pyrolytic polymer patterns between the color filters that fill the openings, forming a capping layer on the color filters and the pyrolytic polymer patterns, and performing a thermal treatment process that removes the pyrolytic polymer patterns and forms air gap regions between the color filters.

公开(公告)号：US20220411916A1

公开(公告)日：2022-12-29

申请号：US17930728

申请日：2022-09-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： KEEWON KIM ,  DAEHAN KIM ,  MINKYUNG LEE

IPC: C23C14/54 ,  H01L51/05 ,  C23C14/56 ,  C23C14/24

Abstract: Disclosed are an apparatus for and a method of manufacturing a semiconductor device. The apparatus includes a chamber, an evaporator that evaporates an organic source to provide a source gas on a substrate in the chamber, a vacuum pump that pumps the source gas and air from the chamber, an exhaust line between the vacuum pump and the chamber, and an analyzer connected to the exhaust line. The analyzer detects a derived molecule produced from the organic source and determines a replacement time of the evaporate

公开(公告)号：US20200251658A1

公开(公告)日：2020-08-06

申请号：US16589330

申请日：2019-10-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： DA IL EOM ,  KEEWON KIM ,  BYEONGTAEK BAE ,  MINKYUNG LEE

IPC: H01L51/00 ,  H01L27/30 ,  H01L51/42

Abstract: A method of measuring an image sensor is disclosed. The method includes connecting a measurement unit to an image sensor, producing an electric current, which sequentially flows through a second connection line, second lower electrodes, an upper electrode, first lower electrodes, and a first connection line of the image sensor, using the measurement unit, and measuring an alignment state of the lower electrodes, the photoelectric conversion layer, and the upper electrode.