BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME

    公开(公告)号:US20240290637A1

    公开(公告)日:2024-08-29

    申请号:US18237547

    申请日:2023-08-24

    Abstract: A brush assembly includes a first brush including a first body that is cylindrical, and a first vertical gear connected to a surface of the cylindrical first body that faces a third body, the first vertical gear being configured to rotate in a first vertical direction, a second brush including a first horizontal gear configured to rotate in a first horizontal direction and a second body connected to a lower portion of the first horizontal gear and rotatably connected to the first body, and a third brush including a second vertical gear connected to a surface of the third body that faces the first body, the second vertical gear being configured to rotate in a second vertical direction that is opposite to the first vertical direction, where the first horizontal gear is engaged with a lower portion of the first vertical gear.

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