公开(公告)号：US20150160445A1

公开(公告)日：2015-06-11

申请号：US14559337

申请日：2014-12-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nobuyuki KIMURA ,  Mitsuhiro TOGASHI ,  Masaki TAKADA ,  Mitsunori NUMATA

IPC: G02B21/06 ,  F21V8/00 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/06 ,  G02B6/0008 ,  G02B6/03694 ,  G02B21/0016 ,  G02B21/082 ,  G02B27/0994

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract translation: 提供了一种照明装置，以及使用该照明装置的光学检查装置和光学显微镜。 照明装置包括发光的光源，输出比预定的光线角度分布更均匀地强的光的光学装置; 具有多次反射光的多反射装置，具有光入射面的多反射装置和发射多重反射光的发光面，以及扩散装置，其将从发光面发射的光扩散到 多反射装置。 光源，光学器件，多反射器件和光扩散器件共享光路。

公开(公告)号：US20140361168A1

公开(公告)日：2014-12-11

申请号：US14294639

申请日：2014-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Takashi OGAWA ,  Yasutsugu USAMI ,  Mitsuhiro TOGASHI

IPC: H01J37/26

CPC classification number: H01J37/12 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/281

Abstract: An electron beam apparatus includes at least one electron beam column. The at least one beam column includes an electron beam optical system to irradiate an electron beam on a surface of a sample, and a detection system to detect electrons generated from the electron beam. The electron beam optical system includes an object lens to focus the electron beam on a surface of the sample. The object lens includes an electrostatic lens having a first electrode to which a first voltage is applied, a second electrode that is grounded, a third electrode to which a second voltage is applied, and a fourth electrode that is grounded. The first through fourth electrodes sequentially arranged relative to the sample.

Abstract translation: 电子束装置包括至少一个电子束柱。 所述至少一个光束柱包括用于照射样品表面上的电子束的电子束光学系统和用于检测从电子束产生的电子的检测系统。 电子束光学系统包括将电子束聚焦在样品的表面上的物镜。 物镜包括具有第一电极施加第一电压的静电透镜，接地的第二电极，施加第二电压的第三电极和接地的第四电极。 第一至第四电极相对于样品顺序排列。