公开(公告)号：US20170111986A1

公开(公告)日：2017-04-20

申请号：US15222571

申请日：2016-07-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： WOOK-RAE KIM ,  WON-DON JOO ,  BYEONG-HWAN JEON ,  SUNG-HWI CHO ,  YOUNG-KYU PARK ,  JUNG-CHUL LEE ,  JIN-WOO AHN

IPC: H05H1/46

CPC classification number: H05H1/46 ,  H01J61/025 ,  H01J61/30 ,  H01J61/54 ,  H01J65/04 ,  H05G2/00 ,  H05H1/24 ,  H05H2240/00

Abstract: A plasma light source apparatus includes a first laser generator configured to generate a first laser. A second laser generator is configured to generate a second laser. A chamber is configured to accommodate and seal a medium material for plasma ignition and to allow plasma to be ignited by the first laser and to be maintained by the second laser. An inner surface of the chamber includes two curved mirrors that face each other.