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公开(公告)号：US20210364551A1
公开(公告)日：2021-11-25
申请号：US17065135
申请日：2020-10-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Joonsu JI , Jinwoo JUNG , Taejun KIM , Serim LEE
Abstract: A probe card test apparatus including an insulating substrate; a conductive pattern on the insulating substrate; and a plurality of device under test (DUT) units on the conductive pattern, wherein each of the DUT units includes a merged-probe opening, a probe opening, and a detector in parallel, and an isolator surrounding the merged-probe opening, the probe opening, and the detector.
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