公开(公告)号：US20240282604A1

公开(公告)日：2024-08-22

申请号：US18439813

申请日：2024-02-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sunwoo PARK ,  Minwoo RHEE ,  Sujie KANG ,  Bumki MOON ,  Seungdon LEE ,  Hyunjin LEE ,  Kyeongbin LIM

IPC: H01L21/67 ,  H01L21/66

CPC classification number: H01L21/6715 ,  H01L21/67288 ,  H01L22/20

Abstract: A method of manufacturing a semiconductor device includes: performing a first semiconductor process on a semiconductor wafer including a front side and a back side opposing the front side; loading the semiconductor wafer into a semiconductor processing apparatus including a support, a spraying apparatus, and a warpage measuring apparatus, wherein the semiconductor wafer is supported by the support, wherein the spraying apparatus is disposed below the semiconductor wafer, and the warpage measuring apparatus is an apparatus configured to measure warpage of the semiconductor wafer; forming a warpage compensation pattern on the back side of the semiconductor wafer using the spraying apparatus until a warpage measurement value of the semiconductor wafer is within a predetermined range, while measuring warpage of the semiconductor wafer using the warpage measuring apparatus; and unloading, from the semiconductor processing apparatus, the semiconductor wafer on which the warpage compensation pattern is formed.

公开(公告)号：US20170266957A1

公开(公告)日：2017-09-21

申请号：US15254019

申请日：2016-09-01

Applicant: SAMSUNG DISPLAY CO., LTD. ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongjun LEE ,  Minsoo KIM ,  Jongwon KIM ,  Seungdon LEE ,  Hyunjin LEE

IPC: B41J2/045 ,  H01L51/52 ,  G02F1/1341 ,  G02F1/133 ,  G02F1/1337 ,  H01L51/56 ,  H01L27/32

CPC classification number: B41J2/04541 ,  B41J2/04586 ,  G02F1/1303 ,  G02F1/13306 ,  G02F1/1337 ,  G02F1/1341 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/5253 ,  H01L51/56 ,  H01L2227/323 ,  H01L2251/558

Abstract: An inkjet printing method includes: setting a first region to be printed at a constant print density within a target region to be printed; setting a second region within the target region and closer than the first region to an edge of the target region, wherein the second region is to be printed at a print density that varies according to a position; generating control data for a plurality of nozzles provided on an inkjet head in order to print the first region and the second region; and driving the inkjet head according to the control data.