公开(公告)号：US10040198B2

公开(公告)日：2018-08-07

申请号：US14876612

申请日：2015-10-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyoung-Whan Oh ,  Sung-Chul Go ,  Eun-Kyung Hong ,  Dong-Hyun Kim ,  Jin-Ha Choi

IPC: H01L21/67 ,  B25J9/02 ,  B25J9/16 ,  G01C21/20

Abstract: A method of processing measurement information in which a determined parameter value is determined at each of a plurality of measurement times including determining a predicted parameter value at each of the measurement times, determining an error range at each of the measurement times based on the predicted parameter value, obtaining a measured parameter value at each of the measurement times, and determining the determined parameter value based on the predicted parameter value, the measured parameter value, and the error range.