公开(公告)号：US20240127425A1

公开(公告)日：2024-04-18

申请号：US18195190

申请日：2023-05-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungwook HWANG ,  Tae Soo SHIN ,  Seulgi OK ,  Kibum LEE

IPC: G06T7/00 ,  G01N23/2251 ,  G06T7/70

CPC classification number: G06T7/001 ,  G01N23/2251 ,  G06T7/70 ,  G01N2223/418 ,  G01N2223/6116 ,  G06T2207/10061 ,  G06T2207/20084 ,  G06T2207/20132 ,  G06T2207/30148

Abstract: A defect detection device includes: a memory configured to store a layout image indicating a circuit pattern and indicating a dummy pattern; and a controller comprising an artificial neural network configured to learn the layout image, the controller being configured to: determine, based on an inspection image obtained by photographing an area including a defect on a wafer, whether the defect is in a first area in which the circuit pattern is positioned or in a second area in which the dummy pattern is positioned, by using the artificial neural network, and determine a type of the defect based on whether the defect is positioned is in the first area or in the second area.