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公开(公告)号:US20240322043A1
公开(公告)日:2024-09-26
申请号:US18609539
申请日:2024-03-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: WOOYEOL MAENG , CHANGKI BAEK , KANGWOOK PARK , HYANGWOO KIM , KYOUNGHWAN OH , HYUNGJIN LEE
CPC classification number: H01L29/7856 , H01L29/408 , H01L29/4983 , H01L29/66803 , H01L29/7835
Abstract: An integrated circuit device includes a fin body, a source and a drain disposed on the fin body, a channel disposed in the fin body between the source and the drain, a drain extension region disposed in the fin body between the drain and the channel, a gate insulating film disposed on the channel and the drain extension region, a high-permittivity layer disposed on the gate insulating film over the drain extension region, and a double gate including a first gate disposed on the gate insulating film above the channel adjacent to the source and a second gate in contact with the first gate. A first work function of the first gate is greater than a second work function of the second gate.