公开(公告)号：US12283497B2

公开(公告)日：2025-04-22

申请号：US17155672

申请日：2021-01-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Uk Choi ,  Yeon Tae Kim ,  Tae Soon Park ,  Kee Soo Park ,  Sung-Gyu Park ,  Kwang-Hyun Yang ,  Seung Hun Lee

IPC: C23C16/52 ,  C23C16/44 ,  C23C16/455 ,  C30B25/08 ,  C30B25/10 ,  C30B25/16 ,  H01L21/67

Abstract: The present disclosure provides a semiconductor deposition monitoring device comprising a supporting table, a chamber, a lamp, an optical sensor, a conduit, a plurality of sensors in the conduit, and a heat exchanger. The supporting table supports a deposition target wafer on which a deposition material is deposited. The chamber comprises an upper dome and a lower dome. The lamp emits light to the chamber. The optical sensor receives the irradiated light and measures the deposition material formed in the chamber. The conduit has an inlet conduit through which air is injected into the chamber and an outlet conduit through which the air is discharged from the chamber. The plurality of sensors sense information of the air. The sensed information may be used to control the heat exchanger.