SEMICONDUCTOR APPARATUS INCLUDING AN OPTICAL DEVICE AND AN ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    SEMICONDUCTOR APPARATUS INCLUDING AN OPTICAL DEVICE AND AN ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING THE SAME 审中-公开
    包含光学器件和电子器件的半导体器件及其制造方法

    公开(公告)号:US20140212087A1

    公开(公告)日:2014-07-31

    申请号:US14163069

    申请日:2014-01-24

    Abstract: A method of manufacturing a semiconductor apparatus includes forming a gate structure and an etch stop layer structure on a substrate including first and second regions. The gate structure is formed in the first region, and the etch stop layer structure is formed in the second region. A first insulating interlayer is formed on the substrate to cover the gate structure and the etch stop layer structure. The first insulating interlayer is partially removed to expose the etch stop layer structure. The exposed etch stop layer is removed to expose the substrate. An optical device is formed on the exposed substrate.

    Abstract translation: 制造半导体器件的方法包括在包括第一和第二区域的衬底上形成栅极结构和蚀刻停止层结构。 栅极结构形成在第一区域中,并且蚀刻停止层结构形成在第二区域中。 在衬底上形成第一绝缘中间层以覆盖栅极结构和蚀刻停止层结构。 部分去除第一绝缘中间层以暴露蚀刻停止层结构。 去除暴露的蚀刻停止层以暴露衬底。 在曝光的基板上形成光学器件。

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