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公开(公告)号:US20240268110A1
公开(公告)日:2024-08-08
申请号:US18640528
申请日:2024-04-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yoo-Cheol Shin , Young-Woo Park , Jae-Duk Lee
IPC: H10B43/20 , H01L29/66 , H01L29/788 , H01L29/792 , H10B41/20 , H10B41/27 , H10B41/40 , H10B43/27 , H10B43/35 , H10B43/40
CPC classification number: H10B43/20 , H01L29/66825 , H01L29/66833 , H01L29/7889 , H01L29/7926 , H10B41/20 , H10B41/27 , H10B41/40 , H10B43/27 , H10B43/35 , H10B43/40
Abstract: A semiconductor device includes a peripheral circuit region on a substrate, a polysilicon layer on the peripheral circuit region, a memory cell array region on the polysilicon layer and overlapping the peripheral circuit region, the peripheral circuit region being under the memory cell array region, an upper interconnection layer on the memory cell array region, and a vertical contact through the memory cell array region and the polysilicon layer, the vertical contact connecting the upper interconnection layer to the peripheral circuit region.