-
公开(公告)号:US10738905B2
公开(公告)日:2020-08-11
申请号:US16082664
申请日:2017-01-24
Applicant: SATAKE CORPORATION , MECHANO TRANSFORMER CORPORATION
Inventor: Takafumi Ito , Hironori Arii , Tadashi Matsushita , Sze Keat Chee , Takeshi Yano , Toshiro Higuchi
Abstract: A piezoelectric valve, having superior responsiveness during valve opening and capability to stabilize gas supply at an early stage, includes a gas pressure chamber receiving compressed gas and an exhaust path discharging the compressed gas from the gas pressure chamber; a valve disc placed in the gas pressure chamber to open and close the exhaust path; a piezoelectric element generating a driving force for operation of the valve disc, as a displacement; a displacement magnifying mechanism magnifying the displacement of the piezoelectric element and applying the magnified displacement to the valve disc; and driving means including a signal generator generating a signal including a first prepulse, a second prepulse, and a main pulse, applies a drive voltage to the piezoelectric element using the signal generated by the signal generator, as an input signal to a drive circuit, and drives and opens the valve disc by expanding the piezoelectric element.