Abstract:
In a Hall sensor in which a Hall element and elements serving as heat sources out of components of a circuit for driving the Hall element are arranged close to each other on a silicon substrate, two directions of control currents by spinning current for the Hall element are selected in a vector manner based on signals from temperature sensors arranged close to a periphery of the Hall element, thereby enabling the elimination of a magnetic offset caused by heat generation of the heat sources.
Abstract:
Provided is a highly sensitive vertical Hall element without increasing a chip area. In the vertical Hall element, trenches each filled with an insulating film are formed between a first current supply end and voltage output ends, respectively, which enables the restriction of current flow into the voltage output ends to increase the ratio of a current component perpendicular to a substrate surface, resulting in enhanced sensitivity.
Abstract:
Provided is a Hall element integrated on a single substrate capable of cancelling offset voltage with a spinning switch configured to switch spinning current and capable of simultaneously detecting a horizontal direction magnetic field and a vertical direction magnetic field. The Hall element has a four-fold rotational axis and includes: a P-type semiconductor substrate layer (100) formed of P-type silicon; a vertical magnetic field detection N-type doped region (110) formed on the P-type semiconductor substrate layer; and eight horizontal magnetic field detection N-type doped regions (120, 121) formed so as to surround the vertical magnetic field detection N-type doped region.