公开(公告)号：US20240213077A1

公开(公告)日：2024-06-27

申请号：US18069478

申请日：2022-12-21

Applicant: SEMES CO, LTD.

Inventor： Jeongcheol LEE ,  Jungheum NAM ,  Kyungmo KIM ,  Woojin CHUNG ,  Myunggeun MIN

IPC: H01L21/687 ,  H01L21/67 ,  H05F3/04

CPC classification number: H01L21/68742 ,  H01L21/67051 ,  H01L21/68764 ,  H05F3/04

Abstract: There is provided a substrate processing apparatus. The substrate processing apparatus may include a substrate supporter supporting a substrate, a processing solution feeder supplying a processing solution to the substrate, first and second recovery containers configured to recover the processing solution, a first pipe connected to the first recovery container and including an insulating material, a second pipe connected to the second recovery container and including an insulating material, a first static electricity eliminator in contact with the first pipe, a second static electricity eliminator in contact with the second pipe, and a plurality of first conductive lines connected to the first and second static electricity eliminators.