公开(公告)号：US20240055241A1

公开(公告)日：2024-02-15

申请号：US18206089

申请日：2023-06-06

Applicant: SEMES CO., LTD.

Inventor： Byeong Hyeon KONG

IPC: H01J37/32 ,  G05D23/19

CPC classification number: H01J37/32724 ,  G05D23/1917 ,  H01J2237/2007 ,  H01J2237/24585 ,  H01J2237/2001 ,  H01J2237/334

Abstract: There are provided an electrostatic chuck (ESC) temperature control unit capable of independently controlling multi-zones of an electrostatic chuck using an alternating current (AC) heater and a direct current (DC) heater, and a substrate treating apparatus including the same. The substrate treating apparatus includes: a housing; a substrate support unit; a shower head unit; a plasma generating unit; and an ESC temperature control unit, wherein the ESC temperature control unit which controls a temperature of the electrostatic chuck includes: a plurality of first heaters; a plurality of second heaters providing power different from that of the first heaters; and a control module controlling the first heaters and the second heaters, and the control module independently controls the first heaters and the second heaters.