公开(公告)号：US20240091822A1

公开(公告)日：2024-03-21

申请号：US18239503

申请日：2023-08-29

Applicant: SEMES CO., LTD.

Inventor： Byungwoo SIM ,  Bok Kyu LEE

IPC: B08B3/10 ,  B08B3/02 ,  B08B3/08 ,  B08B13/00

CPC classification number: B08B3/10 ,  B08B3/022 ,  B08B3/08 ,  B08B13/00 ,  B08B2203/002

Abstract: Provided are a liquid chemical tank module and a liquid chemical supply apparatus, the liquid chemical tank module including a tank body having a storage space capable of storing a liquid chemical, a gas ejector for ejecting an inert gas into the liquid chemical to reduce dissolved oxygen in the liquid chemical of the tank body, and a controller for applying a control signal to the gas ejector to control a flow rate of the inert gas, wherein the gas ejector includes a gas pipe extending into the storage space and at least partially dipped in the liquid chemical to supply the inert gas from outside of the tank body into the storage space, and a plurality of ejection nozzles along the extension direction of the gas pipe to eject the inert gas into the storage space or the liquid chemical in the storage space.

公开(公告)号：US20240091683A1

公开(公告)日：2024-03-21

申请号：US18354823

申请日：2023-07-19

Applicant: SEMES CO., LTD.

Inventor： Byungwoo SIM ,  Bok Kyu LEE

IPC: B01D29/66 ,  B01D46/00

CPC classification number: B01D29/66 ,  B01D46/0005 ,  B01D46/0027

Abstract: The present disclosure relates to a filter flushing device and a filter flushing method in which a filter can be flushed and which may include: a main body in which at least one filter can be mounted; a deionized (DI) water supply unit that can selectively supply a plurality of types of DI water having different temperatures to the filter mounted in the main body at desired time intervals, thereby flushing the filter; a drain unit that drains the DI water passing through the filter to the outside of the main body; and a control unit that is electrically connected to the DI water supply unit to apply a control signal to the DI water supply unit so that a temperature and a flow rate of the DI water supplied to the main body through the DI water supply unit can be controlled.