公开(公告)号：US20250038023A1

公开(公告)日：2025-01-30

申请号：US18915552

申请日：2024-10-15

Applicant: SEMES CO., LTD.

Inventor： DUKHYUN SON ,  BYUNG KYU KIM

IPC: H01L21/673 ,  H01L21/677

Abstract: Disclosed is a container. The container includes a housing having an interior space, and a support part that supports an expendable component in the interior space, and the support part includes an alignment pin that aligns the expendable component.

公开(公告)号：US20200066561A1

公开(公告)日：2020-02-27

申请号：US16540859

申请日：2019-08-14

Applicant: SEMES CO., LTD.

Inventor： DUKHYUN SON

IPC: H01L21/673 ,  H01L21/67

Abstract: A buffer unit for storing a substrate includes a housing having a buffer space inside, a substrate support unit that supports one or more substrates in the buffer space, a pressure adjustment unit that adjusts pressure in the buffer space, and a controller that controls the pressure adjustment unit. The pressure adjustment unit includes a gas supply line that supplies a gas for pressurizing the buffer space and a gas exhaust line that reduces the pressure in the buffer space. The controller controls the pressure adjustment unit to maintain the buffer space in a selected one of a filling mode in which the buffer space is filled with the gas and an exhaust mode in which the buffer space is evacuated.

公开(公告)号：US20200066562A1

公开(公告)日：2020-02-27

申请号：US16546104

申请日：2019-08-20

Applicant: SEMES CO., LTD.

Inventor： DUKHYUN SON ,  SANG-KEE LEE

IPC: H01L21/673 ,  H01L21/683

Abstract: Embodiments of the inventive concept provide an apparatus and method for storing a substrate. A buffer unit for storing a substrate includes a housing having an entrance formed at one side and a buffer space inside, a substrate support unit that supports one or more substrates in the buffer space, a pressure adjustment unit that adjusts pressure in the buffer space, and a controller that controls the pressure adjustment unit. The pressure adjustment unit includes a gas supply line that supplies a gas for pressurizing the buffer space and a gas exhaust line that reduces the pressure in the buffer space. At least one of the gas supply line and the gas exhaust line includes a plurality of lines.