公开(公告)号：US20230064141A1

公开(公告)日：2023-03-02

申请号：US17889298

申请日：2022-08-16

Applicant: SEMES CO., LTD.

Inventor： Dong Chan LEE ,  Kyo Bong KIM

IPC: H01J37/32 ,  H01L21/687 ,  H01L21/683

Abstract: An electrostatic chuck includes a chuck body which supports a substrate, at least one pin hole penetrating the chuck body in a vertical direction, a lift pin disposed in one of the at least one pin hole, wherein the lift pin moves along the one of the at least one pin hole, and an expansion member which is provided at an inner circumference of the one of the at least one pin hole, the expansion member having an inner circumferential surface that, in response to a first power, selectively holds or releases an outer circumferential surface of the lift pin.