公开(公告)号：US20240421566A1

公开(公告)日：2024-12-19

申请号：US18581653

申请日：2024-02-20

Applicant: SEMES CO., LTD.

Inventor： Jae Min KIM ,  Gun Min LEE

IPC: H02B1/056 ,  H01L21/67 ,  H01L21/687 ,  H02B1/20

Abstract: Disclosed are a substrate processing equipment and a method of driving the substrate processing equipment, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator inspects a process chamber or a power supply system. The substrate processing equipment for processing a substrate includes: a process processing module including loads utilized in a process for processing a substrate; a branch circuit breaker installed on a periphery to the process processing module and electrically connected to the loads; a main circuit breaker electrically connected to the branch circuit breaker and supplying power to the branch circuit breaker; and a power distribution board in which the branch circuit breaker is mounted, and including a power distribution board door, in which the main circuit breaker cuts off power when the power distribution board door is opened.