公开(公告)号：US11933808B2

公开(公告)日：2024-03-19

申请号：US17564676

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Ji Young Lee ,  Gyeong Ryul Kim ,  Sun Yong Park

IPC: G01P1/02 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

CPC classification number: G01P1/023 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

Abstract: A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.