-
公开(公告)号：US20220088644A1
公开(公告)日：2022-03-24
申请号：US17483438
申请日：2021-09-23
Applicant: SEMES CO., LTD.
Inventor： SEUNG HOON OH , JIN MO JAE , HWAN BIN KIM
Abstract: A unit for removing an adhesive layer formed in a processing chamber includes an ultrasonic generator, and a wiper soaked in a cleaning liquid. The wiper is provided to surround the ultrasonic generator.
Search Results
1
records
(took 0.008 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
