公开(公告)号：US20220178446A1

公开(公告)日：2022-06-09

申请号：US17544950

申请日：2021-12-08

Applicant: SEMES CO., LTD.

Inventor： SEUNG HOON OH ,  SANG MIN LEE ,  JONG DOO LEE ,  JIN MO JAE ,  YOUNG HUN LEE

IPC: F16J15/3204 ,  B08B7/00

Abstract: A sealing member for use in sealing a chamber for treating a substrate, the sealing member inserted in a groove formed in the chamber, includes a bottom part, a top part opposite the bottom part, an inner part connecting a first side of the bottom part to the top part, an outer part opposite the inner part and connecting a second side of the bottom part to the top part, and a recessed portion between the top part and the outer part.

公开(公告)号：US20220088644A1

公开(公告)日：2022-03-24

申请号：US17483438

申请日：2021-09-23

Applicant: SEMES CO., LTD.

Inventor： SEUNG HOON OH ,  JIN MO JAE ,  HWAN BIN KIM

IPC: B08B1/00 ,  B08B3/08

Abstract: A unit for removing an adhesive layer formed in a processing chamber includes an ultrasonic generator, and a wiper soaked in a cleaning liquid. The wiper is provided to surround the ultrasonic generator.