公开(公告)号：US10529595B2

公开(公告)日：2020-01-07

申请号：US15607361

申请日：2017-05-26

Applicant: SEMES CO., LTD.

Inventor： Hyo Won Lee ,  Young Hun Lee

IPC: H01L21/67 ,  B05C11/10 ,  B05C5/00 ,  B05C5/02 ,  H01L21/677

Abstract: Disclosed are an apparatus and a method for liquid-treating a substrate. An apparatus for treating a substrate includes a liquid treating unit that liquid-treats a substrate by supplying a liquid onto a substrate, a weight measuring unit that measures a weight of the remained liquid on the substrate, and a transfer unit that transfers the substrate between the liquid treating unit and the weight measuring unit. Accordingly, the weight of the remained liquid may be measured more promptly.