公开(公告)号：US20250099999A1

公开(公告)日：2025-03-27

申请号：US18675465

申请日：2024-05-28

Applicant: SEMES CO., LTD.

Inventor： Yong Hoon HONG ,  Jin Ah HAN ,  Byung Sun BANG ,  Hyun Woo TAK

IPC: B05B14/30 ,  B05B12/08

Abstract: A treatment liquid supply apparatus includes a discharge line through which treatment liquid is discharged from a substrate processing apparatus; a first tank storing recovered treatment liquid, recovered through the discharge line; a treatment liquid supply unit supplying new treatment liquid to the discharge line through a first transfer line; a first heating unit disposed between the treatment liquid supply unit and the discharge line and controlling a temperature of the new treatment liquid passing through the first transfer line; and a second tank resupplying the recovered treatment liquid supplied from the first tank through a second transfer line to the substrate processing apparatus through a supply line.