公开(公告)号：US10199249B2

公开(公告)日：2019-02-05

申请号：US15266281

申请日：2016-09-15

Applicant: SEMES CO., LTD.

Inventor： Hyunho Lee ,  Myungchan Cho

IPC: H01L21/677 ,  B08B3/04 ,  H01L21/67 ,  H01L21/673

Abstract: An apparatus for treating a substrate, an apparatus for transferring a substrate and a method for transferring a substrate are provided. The substrate treating apparatus comprises a receiving unit having a plurality of vertically arranged substrate supporting members and a transferring unit having an upper transfer member transferring a substrate to the receiving unit. The upper transfer member comprises a first arm and a second that are vertically spaced apart from each other and are independently driven to extend horizontally. A plurality of vertically arranged first hands is connected to the first arm and a single hand is connected to the second arm. According to an embodiment, a plurality of substrates can be transferred to a right position.