公开(公告)号：US20210331466A1

公开(公告)日：2021-10-28

申请号：US17237175

申请日：2021-04-22

Applicant: SEMES CO., LTD.

Inventor： In Seok Ha ,  Jin Hyuck Yang ,  Jae Young Jang

IPC: B41J2/145

Abstract: Provided are a load distribution apparatus capable of efficiently distributing loads for a plurality of inkjet head modules and a substrate treatment system including the same. The load distribution apparatus includes a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module for discharging droplets onto a substrate is installed in the central portion, a first support supporting the second support on at least one side and supporting the second support below the second support, a first support unit supporting the second support on at least one side and supporting the second support above the second support, and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.

公开(公告)号：US11518169B2

公开(公告)日：2022-12-06

申请号：US17237175

申请日：2021-04-22

Applicant: SEMES CO., LTD.

Inventor： In Seok Ha ,  Jin Hyuck Yang ,  Jae Young Jang

IPC: B41J2/145

Abstract: Provided are a load distribution apparatus capable of efficiently distributing loads for a plurality of inkjet head modules and a substrate treatment system including the same. The load distribution apparatus includes a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module for discharging droplets onto a substrate is installed in the central portion, a first support supporting the second support on at least one side and supporting the second support below the second support, a first support unit supporting the second support on at least one side and supporting the second support above the second support, and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.