公开(公告)号：US20190131153A1

公开(公告)日：2019-05-02

申请号：US16168890

申请日：2018-10-24

Applicant: SEMES CO., LTD.

Inventor： YOUNG HUN JUNG ,  JINHWAN KIM

IPC: H01L21/67 ,  H01L21/66 ,  G06K9/62

Abstract: Disclosed is an apparatus for monitoring substrate processing, the apparatus including a process data acquisition unit that acquires process data regarding the substrate processing from substrate processing equipment, a storage unit that stores screen configuration data regarding a process monitoring screen that is configured to match a layout of the substrate processing equipment, a processing unit that imports the screen configuration data and operates the process monitoring screen according to the process data, and a control unit that classifies the process data according to time points and outputs a process data value at a specific time point on the process monitoring screen.