公开(公告)号：US12251944B2

公开(公告)日：2025-03-18

申请号：US17885552

申请日：2022-08-11

Applicant: SEMES CO., LTD.

Inventor： Han Lim Kang ,  Suk Won Jang ,  Jae Duck Lee ,  Won Yong Jin

IPC: B41J2/21 ,  G01B11/24

Abstract: A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in the plurality of nozzles to a film to form a detection pattern on the film by bringing the film into close contact with the plurality of nozzles, measuring meniscus of ink remaining in the plurality of nozzles based on the detection pattern.

公开(公告)号：US12097696B2

公开(公告)日：2024-09-24

申请号：US17958435

申请日：2022-10-03

Applicant: SEMES CO., LTD.

Inventor： Jae Duck Lee ,  Han Lim Kang ,  Won Yong Jin ,  Suk Won Jang

IPC: B41J2/125 ,  B41J2/045 ,  G01N15/1434

CPC classification number: B41J2/125 ,  B41J2/0454 ,  B41J2/04561 ,  G01N15/1436 ,  G01N2015/1438 ,  G01N2015/144

Abstract: Provided are a fringe information measuring apparatus that measures information on a fringe region using a temperature sensor array and a substrate treating system including the same. The fringe information measuring apparatus comprises: a laser sensor configured to output a first laser light and a second laser light to intersect each other; a thermal sensor array configured to pass through a fringe region formed by the intersection of the first laser light and the second laser light; and a control module configured to measure a position of the fringe region based on information obtained when the thermal sensor array passes through the fringe region.