公开(公告)号：US20220328333A1

公开(公告)日：2022-10-13

申请号：US17704195

申请日：2022-03-25

Applicant: SEMES CO., LTD.

Inventor： Seong Hyun YUN ,  Jung Heum NAM

IPC: H01L21/67 ,  H01J37/32 ,  H01L21/677 ,  H01L21/687 ,  B65G47/90

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a process chamber configured to treat a substrate; a transfer assembly configured to transfer the substrate to the process chamber; and a diagnosis unit configured to detect an abnormal state of the transfer assembly, and wherein the transfer assembly comprises: a housing having a transfer space; and a transfer robot configured to transfer the substrate to the process chamber, and wherein the diagnosis unit comprises: a detection member for detecting an air vibration generated within the housing; and a diagnosis member for diagnosing a driving unit of the transfer assembly based on the air vibration detected by the detection member.