公开(公告)号：US20240222150A1

公开(公告)日：2024-07-04

申请号：US18399894

申请日：2023-12-29

Applicant: SEMES CO., LTD.

Inventor： Eunseok KIM ,  Kibong KIM

IPC: H01L21/67 ,  G05D7/06

CPC classification number: H01L21/67017 ,  G05D7/0652

Abstract: A valve control device includes a plurality of valves respectively installed on a plurality of first pipes through which a supply fluid flows and configured to control opening and closing of the plurality of first pipes, a manifold including a second pipe connected to each of the plurality of valves and supplying a control gas to the plurality of valves, and a flow rate controller installed on the second pipe to adjust a flow rate of the control gas flowing through the second pipe, wherein the plurality of valves include at least one of a normal open (NO) type valve and a normal close (NC) valve.