公开(公告)号：US12234107B2

公开(公告)日：2025-02-25

申请号：US17750223

申请日：2022-05-20

Applicant: SEMES CO., LTD.

Inventor： Myung Jin Lee ,  Sang Oh Kim ,  Hee Jae Byun ,  Na Hyun Lee

IPC: B65G47/92 ,  H02K41/03

Abstract: A substrate transferring apparatus including a non-contact type driving unit is provided. The substrate transferring apparatus comprises a stator assembly including a driving surface and an electromagnetic generating module, a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

公开(公告)号：US12283510B2

公开(公告)日：2025-04-22

申请号：US17747914

申请日：2022-05-18

Applicant: SEMES CO., LTD.

Inventor： Sang Oh Kim ,  Myung Jin Lee

IPC: H01L21/68 ,  B65G47/90 ,  H01L21/677 ,  H01L21/687

Abstract: The present disclosure provides a substrate treating apparatus having improved efficiency and productivity. The substrate treating apparatus of the present disclosure comprises a process chamber having a treating space therein, a transfer robot comprising a robot hand for loading and unloading a substrate into and out of the treating space and gripping the substrate, and a teaching buffer for aligning the robot hand, wherein the teaching buffer comprises a teaching plate for providing a reference point, and at least one camera looking at the teaching plate, wherein the camera captures the reference point of the teaching plate, wherein the transfer robot aligns the robot hand with the reference point using the camera.

公开(公告)号：US12240709B2

公开(公告)日：2025-03-04

申请号：US17750359

申请日：2022-05-22

Applicant: SEMES CO., LTD.

Inventor： Hee Jae Byun ,  Sang Oh Kim ,  Na Hyun Lee ,  Myung Jin Lee

IPC: B66F7/02 ,  B65G47/90 ,  B66F11/00 ,  H01L21/677

Abstract: A tower lift includes a main frame, a first carriage module and a second carriage module connected with each other inside the main frame at left and right sides of the main frame, respectively, having the same weight as each other, and configured to be moved in a vertical direction, and a driving module installed on the main frame and configured to move the first carriage module and the second carriage module in the vertical direction.