公开(公告)号：US12240709B2

公开(公告)日：2025-03-04

申请号：US17750359

申请日：2022-05-22

Applicant: SEMES CO., LTD.

Inventor： Hee Jae Byun ,  Sang Oh Kim ,  Na Hyun Lee ,  Myung Jin Lee

IPC: B66F7/02 ,  B65G47/90 ,  B66F11/00 ,  H01L21/677

Abstract: A tower lift includes a main frame, a first carriage module and a second carriage module connected with each other inside the main frame at left and right sides of the main frame, respectively, having the same weight as each other, and configured to be moved in a vertical direction, and a driving module installed on the main frame and configured to move the first carriage module and the second carriage module in the vertical direction.

公开(公告)号：US20230111772A1

公开(公告)日：2023-04-13

申请号：US17750223

申请日：2022-05-20

Applicant: SEMES CO., LTD.

Inventor： Myung Jin LEE ,  Sang Oh Kim ,  Hee Jae Byun ,  Na Hyun Lee

IPC: B65G47/92

Abstract: A substrate transferring apparatus including a non-contact type driving unit is provided. The substrate transferring apparatus comprises a stator assembly including a driving surface and an electromagnetic generating module, a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

公开(公告)号：US12234107B2

公开(公告)日：2025-02-25

申请号：US17750223

申请日：2022-05-20

Applicant: SEMES CO., LTD.

Inventor： Myung Jin Lee ,  Sang Oh Kim ,  Hee Jae Byun ,  Na Hyun Lee

IPC: B65G47/92 ,  H02K41/03

Abstract: A substrate transferring apparatus including a non-contact type driving unit is provided. The substrate transferring apparatus comprises a stator assembly including a driving surface and an electromagnetic generating module, a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.