公开(公告)号：US11829070B2

公开(公告)日：2023-11-28

申请号：US17557230

申请日：2021-12-21

Applicant: SEMES CO., LTD.

Inventor： Ju Won Kim ,  Jun Ho Seo ,  Dong Woon Park ,  Sang Pil Yoon

IPC: G03F7/16 ,  B05C11/02

CPC classification number: G03F7/162 ,  B05C11/02

Abstract: An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.