公开(公告)号：US11935779B2

公开(公告)日：2024-03-19

申请号：US17513002

申请日：2021-10-28

申请人： SEMES CO., LTD.

发明人： Tae Hoon Lee ,  Ju Won Kim ,  Jin Sung Sun ,  Bo Hee Lee

IPC分类号： H01L21/677 ,  H01L21/683 ,  H01L21/687

CPC分类号： H01L21/6838 ,  H01L21/67778 ,  H01L21/68707

摘要： Various example embodiments provide a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuum assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.

公开(公告)号：US11829070B2

公开(公告)日：2023-11-28

申请号：US17557230

申请日：2021-12-21

申请人： SEMES CO., LTD.

发明人： Ju Won Kim ,  Jun Ho Seo ,  Dong Woon Park ,  Sang Pil Yoon

IPC分类号： G03F7/16 ,  B05C11/02

CPC分类号： G03F7/162 ,  B05C11/02

摘要： An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.