公开(公告)号：US10763152B2

公开(公告)日：2020-09-01

申请号：US15823311

申请日：2017-11-27

Applicant: SEMES CO., LTD.

Inventor： Min Woo Jo ,  Cheolmin Choi ,  Sanguk Park ,  Man Kyu Kang

IPC: B25B11/00 ,  H01L21/687 ,  H01L21/67 ,  H01L21/677

Abstract: Embodiments of the inventive concept relate to a substrate treating apparatus. A substrate support unit configured to support a substrate includes a support plate, on which the substrate is positioned, the support plate may include a passage formed on an upper surface of the support plate and connecting a central area and a side surface of the support plate, and a recess formed in a peripheral area of the support plate and recessed inwards from a side surface of the support plate, and the recess may communicate with one end of the passage.