-
公开(公告)号：US20240222159A1
公开(公告)日：2024-07-04
申请号：US18337515
申请日：2023-06-20
Applicant: SEMES CO., LTD.
Inventor： Se Hyeong CHOI
IPC: H01L21/67 , H01L21/687
CPC classification number: H01L21/67103 , H01L21/6708 , H01L21/68714
Abstract: A bowl for processing a substrate includes an opening disposed in an upper portion and allowing a substrate to be discharged and input therethrough; a cup configured to form a processing space for processing the substrate; and an edge heating portion provided in the cup and configured to heat an edge of the substrate.
Search Results
1
records
(took 0.012 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
