公开(公告)号：US11579538B2

公开(公告)日：2023-02-14

申请号：US17130619

申请日：2020-12-22

Applicant: SEMES CO., LTD.

Inventor： Yong Hun Sim ,  Jinwook Jung ,  Seungwon Kim ,  Seokhee Kim ,  Jaehee Hwang ,  Jun Cheol Park

IPC: G03F7/20 ,  H01L21/67 ,  B65G47/90 ,  H01L21/677

Abstract: A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.