公开(公告)号：US12176229B2

公开(公告)日：2024-12-24

申请号：US17466270

申请日：2021-09-03

Applicant: SEMES CO., LTD.

Inventor： Yong Bae Choi ,  Ji Hyun Park ,  Shin Young Cheong

IPC: H01L21/673

Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.