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公开(公告)号:US12240699B2
公开(公告)日:2025-03-04
申请号:US17349467
申请日:2021-06-16
Applicant: SEMES CO., LTD.
Inventor: Young Woo Kim , Jin Ho Song , Yong Bae Choi , Ji Hyun Park
Abstract: An article storage device includes a load port configured to load and unload a plurality of articles, a plurality of shelves configured to load the articles, a transportation robot configured to transport the articles between the load port and the shelves or between the shelves, a receiving part configured to receive operation commands of the transportation robot from an upper system, a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands, and a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands.
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公开(公告)号:US12176229B2
公开(公告)日:2024-12-24
申请号:US17466270
申请日:2021-09-03
Applicant: SEMES CO., LTD.
Inventor: Yong Bae Choi , Ji Hyun Park , Shin Young Cheong
IPC: H01L21/673
Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.
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