公开(公告)号：US12278088B2

公开(公告)日：2025-04-15

申请号：US17092757

申请日：2020-11-09

Applicant: SEMES CO., LTD.

Inventor： Il Gyo Koo ,  Harutyun Melikyan ,  Hyo Seong Seong ,  Soojin Lee

IPC: H01L21/3065 ,  H01J37/32

Abstract: Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.

公开(公告)号：US20170358427A1

公开(公告)日：2017-12-14

申请号：US15689519

申请日：2017-08-29

Applicant: SEMES CO., LTD.

Inventor： Il Gyo KOO ,  Harutyun Melikyan ,  Hyo Seong Seong ,  Soojin Lee

IPC: H01J37/32

CPC classification number: H01J37/32091 ,  H01J37/3211

Abstract: Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.