公开(公告)号：US20230074783A1

公开(公告)日：2023-03-09

申请号：US17987062

申请日：2022-11-15

Applicant: SEMES CO., LTD.

Inventor： Sunmi KIM ,  Oh Jin KWON ,  Sehyeong CHOI

IPC: B08B3/02 ,  B08B6/00 ,  B08B7/04

Abstract: The inventive concept provides a nozzle for dispensing a treatment liquid in which plasma is generated. The nozzle includes a body having an interior space, a liquid supply unit that supplies the treatment liquid into the interior space, and electrodes that generate the plasma in the interior space. The liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.

公开(公告)号：US20210060622A1

公开(公告)日：2021-03-04

申请号：US17009051

申请日：2020-09-01

Applicant: SEMES CO., LTD.

Inventor： Sunmi KIM ,  Oh Jin KWON ,  Sehyeong CHOI

IPC: B08B3/02 ,  B08B7/04 ,  B08B6/00

Abstract: The inventive concept provides a nozzle for dispensing a treatment liquid in which plasma is generated. The nozzle includes a body having an interior space, a liquid supply unit that supplies the treatment liquid into the interior space, and electrodes that generate the plasma in the interior space. The liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.