公开(公告)号：US20230073867A1

公开(公告)日：2023-03-09

申请号：US17940207

申请日：2022-09-08

Applicant: SEMES CO., LTD. ,  SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

Inventor： Jung Suk GOH ,  A Rah CHO ,  Woo Sin JUNG ,  Dae Sung KIM ,  Hae Kyung KIM ,  Hyungmin PARK ,  Jungjin LEE ,  Linfeng PIAO ,  Jubeom LEE

IPC: G03F7/16

Abstract: Provided is a liquid supplying apparatus including: a trap tank for receiving a liquid from a storage bottle in which the liquid is stored and accommodating the received liquid; a pipe for connecting the storage bottle and the trap tank; and a valve installed on the pipe and for opening and closing a flow path of the pipe, in which the valve is installed closer to the storage bottle than the trap tank.

公开(公告)号：US20230073468A1

公开(公告)日：2023-03-09

申请号：US17902094

申请日：2022-09-02

Applicant: SEMES CO., LTD. ,  SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

Inventor： Jung Suk GOH ,  A Rah CHO ,  Hyungmin PARK ,  Linfeng PIAO ,  Jubeom LEE ,  Jungjin LEE

IPC: G01N15/00 ,  G03F7/16

Abstract: The inventive concept relates to an apparatus for treating a substrate. The apparatus includes a liquid supply unit that supplies a liquid to a substrate, a cover that is formed of a light transmitting material and installed on a component provided in the liquid supply unit and that provides an inspection area, and an inspection unit that inspects bubbles contained in the liquid flowing in the component provided in the inspection area. The inspection unit includes a light source that applies light toward the inspection area from outside the cover, a light receiving part that is located outside the cover and that receives the light passing through the inspection area, and an inspection part that inspects the bubbles from the light received by the light receiving part.