公开(公告)号：US20150001418A1

公开(公告)日：2015-01-01

申请号：US14314448

申请日：2014-06-25

Applicant: SEN Corporation

Inventor： Noriyasu Ido ,  Kouji Inada ,  Kazuhiro Watanabe

IPC: H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/244 ,  H01J2237/24405 ,  H01J2237/24528 ,  H01J2237/24535

Abstract: An ion beam measuring device includes: a mask that is used for shaping an original ion beam into a measuring ion beam including a y beam part elongated in a y direction that is perpendicular to a traveling direction of the ion beam and an x beam part elongated in an x direction that is perpendicular to the traveling direction and the y direction; a detection unit that is configured to detect an x-direction position of the y beam part and a y-direction position of the x beam part; and a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction position and a y-direction beam angle using the y-direction position.

Abstract translation: 一种离子束测量装置，包括：掩模，其用于将原始离子束成形为测量离子束，所述测量离子束包括垂直于离子束的行进方向的ay方向延长的ay光束部分和在垂直于离子束的行进方向延伸的x光束部分 x方向垂直于行进方向和y方向; 检测单元，被配置为检测所述y光束部分的x方向位置和所述x光束部分的y方向位置; 以及射束角计算单元，被配置为使用y方向位置来计算x方向射束角度，并且使用y方向位置来计算y方向射束角度。